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Light Source Device for Semiconductor Lithography


Onishi, M and Hugrass, W, Light Source Device for Semiconductor Lithography (2012) [Patent]

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Item Details

Item Type:Patent
Research Division:Physical Sciences
Research Group:Atomic, Molecular, Nuclear, Particle and Plasma Physics
Research Field:Plasma Physics; Fusion Plasmas; Electrical Discharges
Objective Division:Manufacturing
Objective Group:Computer Hardware and Electronic Equipment
Objective Field:Integrated Circuits and Devices
UTAS Author:Hugrass, W (Dr Waheed Hugrass)
ID Code:79506
Year Published:2012
Deposited By:Information and Communication Technology
Deposited On:2012-09-18
Last Modified:2012-09-19

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