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Light Source Device for Semiconductor Lithography
Citation
Onishi, M and Hugrass, W, Light Source Device for Semiconductor Lithography (2012) [Patent]
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Item Details
| Item Type: | Patent |
|---|---|
| Research Division: | Physical Sciences |
| Research Group: | Nuclear and plasma physics |
| Research Field: | Plasma physics; fusion plasmas; electrical discharges |
| Objective Division: | Manufacturing |
| Objective Group: | Computer, electronic and communication equipment |
| Objective Field: | Integrated circuits and devices |
| UTAS Author: | Hugrass, W (Dr Waheed Hugrass) |
| ID Code: | 79506 |
| Year Published: | 2012 |
| Deposited By: | Information and Communication Technology |
| Deposited On: | 2012-09-18 |
| Last Modified: | 2012-09-19 |
| Downloads: | 0 |
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