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Light Source Device for Semiconductor Lithography

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Onishi, M and Hugrass, W, Light Source Device for Semiconductor Lithography (2012) [Patent]

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Item Details

Item Type:Patent
Research Division:Physical Sciences
Research Group:Nuclear and plasma physics
Research Field:Plasma physics; fusion plasmas; electrical discharges
Objective Division:Manufacturing
Objective Group:Computer, electronic and communication equipment
Objective Field:Integrated circuits and devices
UTAS Author:Hugrass, W (Dr Waheed Hugrass)
ID Code:79506
Year Published:2012
Deposited By:Information and Communication Technology
Deposited On:2012-09-18
Last Modified:2012-09-19
Downloads:0

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