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Light Source for Semiconductor Lithography
Citation
Masami, O and Hugrass, W, Light Source for Semiconductor Lithography (2010) [Patent]
Item Details
| Item Type: | Patent |
|---|---|
| Research Division: | Physical Sciences |
| Research Group: | Atomic, Molecular, Nuclear, Particle and Plasma Physics |
| Research Field: | Plasma Physics; Fusion Plasmas; Electrical Discharges |
| Objective Division: | Manufacturing |
| Objective Group: | Computer Hardware and Electronic Equipment |
| Objective Field: | Computer and Electronic Office Equipment |
| UTAS Author: | Hugrass, W (Dr Waheed Hugrass) |
| ID Code: | 68992 |
| Year Published: | 2010 |
| Deposited By: | Information and Communication Technology |
| Deposited On: | 2011-04-14 |
| Last Modified: | 2011-04-14 |
| Downloads: | 0 |
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