University of Tasmania
Browse

File(s) not publicly available

Light Source for Semiconductor Lithography

standard
posted on 2023-05-25, 06:58 authored by Masami, O, Hugrass, W
No description available

History

Department/School

School of Information and Communication Technology

Repository Status

  • Restricted

Socio-economic Objectives

Computer and electronic office equipment (excl. communication equipment)

Patent ID

2010-040329

Patent Application Number

2008-201897

Patent Territory

Japan

Usage metrics

    University Of Tasmania

    Exports

    RefWorks
    BibTeX
    Ref. manager
    Endnote
    DataCite
    NLM
    DC