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Light Source for Semiconductor Lithography


Masami, O and Hugrass, W, Light Source for Semiconductor Lithography (2010) [Patent]

Item Details

Item Type:Patent
Research Division:Physical Sciences
Research Group:Nuclear and plasma physics
Research Field:Plasma physics; fusion plasmas; electrical discharges
Objective Division:Manufacturing
Objective Group:Computer, electronic and communication equipment
Objective Field:Computer and electronic office equipment (excl. communication equipment)
UTAS Author:Hugrass, W (Dr Waheed Hugrass)
ID Code:68992
Year Published:2010
Deposited By:Information and Communication Technology
Deposited On:2011-04-14
Last Modified:2011-04-14

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