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Light Source for Semiconductor Lithography

Citation

Masami, O and Hugrass, W, Light Source for Semiconductor Lithography (2010) [Patent]

Item Details

Item Type:Patent
Research Division:Physical Sciences
Research Group:Atomic, Molecular, Nuclear, Particle and Plasma Physics
Research Field:Plasma Physics; Fusion Plasmas; Electrical Discharges
Objective Division:Manufacturing
Objective Group:Computer Hardware and Electronic Equipment
Objective Field:Computer and Electronic Office Equipment
Author:Hugrass, W (Dr Waheed Hugrass)
ID Code:68992
Year Published:2010
Deposited By:Information and Communication Technology
Deposited On:2011-04-14
Last Modified:2011-04-14
Downloads:0

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