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Fabrication of a glass-implemented capillary electrophoresis device with integrated contactless conductivity detection


Berthold, A and Laugere, F and Schellevis, H and de Boer, CR and Laros, M and Guijt, RM and Sarro, PM and Vellekoop, MJ, Fabrication of a glass-implemented capillary electrophoresis device with integrated contactless conductivity detection, Electrophoresis, 23, (20) pp. 3511-3519. ISSN 0173-0835 (2002) [Refereed Article]

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DOI: doi:10.1002/1522-2683(200210)23:20<3511::AID-ELPS3511>3.0.CO;2-C


Glass microdevices for capillary electrophoresis (CE) gained a lot of interest in the development of micrototal analysis systems (TAS). The fabrication of a TAS requires integration of sampling, chemical separation and detection systems into a microdevice. The integration of a detection system into a microchannel, however, is hampered by the lack of suitable microfabrication technology. Here, a microfabrication method for integration of insulated microelectrodes inside a leakage-free microchannel in glass is presented. A combination of newly developed technological approaches, such as low-temperature glass-to-glass anodic bonding, channel etching, fabrication of buried metal interconnects, and deposition of thin plasma-enhanced chemical vapour deposition (PECVD) silicon carbide layers, enables the fabrication of a CE microdevice with an integrated contactless conductivity detector. The fabrication method of this CE microdevice with integrated contactless conductivity detector is described in detail. Standard CE separations of three inorganic cations in concentrations down to 5 M show the viability of the new CE system.

Item Details

Item Type:Refereed Article
Keywords:Buried interconnects Capillary electrophoresis Glass processing Isotropic dry etching Miniaturized total analysis system
Research Division:Engineering
Research Group:Other engineering
Research Field:Other engineering not elsewhere classified
Objective Division:Expanding Knowledge
Objective Group:Expanding knowledge
Objective Field:Expanding knowledge in the chemical sciences
UTAS Author:Guijt, RM (Dr Rosanne Guijt)
ID Code:43563
Year Published:2002
Web of Science® Times Cited:60
Deposited By:Chemistry
Deposited On:2007-03-15
Last Modified:2014-08-11
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