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Characterization of epitaxial heavily doped silicon regions formed by Hot-Wire chemical vapor deposition using Micro-Raman and microphotoluminescence spectroscopy

Citation

Rahman, T and Nguyen, HT and Tarazona, A and Shi, J and Han, YJ and Franklin, E and MacDonald, D and Boden, SA, Characterization of epitaxial heavily doped silicon regions formed by Hot-Wire chemical vapor deposition using Micro-Raman and microphotoluminescence spectroscopy, IEEE Journal of Photovoltaics, 8, (3) pp. 813-819. ISSN 2156-3381 (2018) [Refereed Article]


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DOI: doi:10.1109/JPHOTOV.2018.2818284

Abstract

We report on the characterization of heavily boron doped epitaxial silicon regions grown in a hot-wire chemical vapor deposition tool, using micro-Raman and photoluminescence spectroscopy. In particular, the use of this approach for emitter fabrication in an interdigitated back contact silicon solar cell is studied, by analyzing its suitability concerning selective growth, uniformity, anneal time, and luminescent defects. We show that by reducing the silane flow rate, both the required postanneal time and intensity of defect luminescence are reduced. Furthermore, we show that selective area growth does not affect either the quality of the films or the sharpness of the resulting lateral doping profile. The uniformity of the doping is shown to be better than that achieved using laser doping.

Item Details

Item Type:Refereed Article
Keywords:Epitaxy, hot-wire chemical vapor deposition (HWCVD), laser doping, silicon, spectral photoluminescence (PL)
Research Division:Engineering
Research Group:Mechanical engineering
Research Field:Energy generation, conversion and storage (excl. chemical and electrical)
Objective Division:Energy
Objective Group:Processing of energy sources
Objective Field:Processing of energy sources not elsewhere classified
UTAS Author:Franklin, E (Associate Professor Evan Franklin)
ID Code:152324
Year Published:2018
Web of Science® Times Cited:2
Deposited By:Physics
Deposited On:2022-08-17
Last Modified:2022-08-17
Downloads:0

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