eCite Digital Repository

Phosphorus diffused LPCVD polysilicon passivated contacts with in-situ low pressure oxidation


Fong, KC and Ko, TC and Liang, WS and Chong, TK and Ernst, M and Walter, D and Stocks, M and Franklin, E and McIntosh, K and Blakers, A, Phosphorus diffused LPCVD polysilicon passivated contacts with in-situ low pressure oxidation, Solar Energy Materials & Solar Cells, 186 pp. 236-242. ISSN 0927-0248 (2018) [Refereed Article]

Copyright Statement

2018 Elsevier B.V.


As silicon photovoltaic technology advances, charge carrier losses at the contacted interfaces of the silicon absorber are coming to dominate power conversion efficiency. The so-called passivated contact, which provides selective charge-carrier extraction while simultaneously reducing interface recombination, is thus of significant interest for next-generation silicon solar cells. However, achieving both low recombination and low resistance to charge carrier extraction has proven challenging. Here, we present a passivated contact technology based on polysilicon deposited using low pressure chemical vapour deposition (LPCVD) over an ultra-thin silicon dioxide layer, which achieves an excellent surface passivation with implied open-circuit voltage of 735 mV, a recombination prefactor below 1 fA cm−2 and contact resistivity below 1 mΩ cm2.

Key to this technology is the deposition of an ultra-thin silicon dioxide interlayer under high temperature and low pressure condition, performed in-situ within a single process with the polysilicon deposition. Additionally, the passivating contact structure maintains its electronic properties at temperatures of up to 900 C and is compatible with existing industrial processes. The presented work therefore represents a significant advancement in industrially-applicable passivated contact technology.

Item Details

Item Type:Refereed Article
Keywords:Passivated contacts, polysilicon, tunnel oxide, LPCVD, solar cells, contact resistivity
Research Division:Engineering
Research Group:Electrical engineering
Research Field:Photovoltaic power systems
Objective Division:Energy
Objective Group:Renewable energy
Objective Field:Solar-photovoltaic energy
UTAS Author:Franklin, E (Associate Professor Evan Franklin)
ID Code:151353
Year Published:2018
Deposited By:Engineering
Deposited On:2022-07-27
Last Modified:2022-11-10

Repository Staff Only: item control page