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Design and simulation of film bulk acoustic wave resonator in ku band
conference contribution
posted on 2023-05-23, 11:16 authored by Nor, NIM, Shah, K, Singh, J, Sauli, ZThis paper presents the design of a Film Bulk Acoustic Wave Resonators (FBARs) operating in Ku-band. The one-dimensional (1-D) numerical and the three-dimension (3-D) Finite Element Method (FEM) simulation results are analysed and compared. The results show that coupling coefficient (k2 eff) up to 6.5% can be obtained with optimised thickness ratio of electrode/piezoelectric layers of operating frequencies greater than 15GHz. The FBARs have areas of 1.69x10-4μm2 and 7.84x10-4μm2 for series resonance frequency of 14.7GHz and 15.9GHz respectively and achieves quality (Q) factor of 300. The designed FBAR filter operating in Ku-band has the centre frequency of 15.5 GHz, the insertion loss of 3.5dB, out-of-band rejection of 13dB and fractional bandwidth of 6.6%.
History
Publication title
Advanced Materials ResearchVolume
662Pagination
556-561ISSN
1022-6680Publisher
Scientific.NetPlace of publication
SwitzerlandEvent title
2012 International Conference on Nanotechnology and Precision Engineering (ICNPE 2012)Event Venue
Guilin, ChinaDate of Event (Start Date)
2012-12-26Date of Event (End Date)
2012-12-27Repository Status
- Restricted