Film bulk acoustic wave resonator (FBAR) filter for Ku-band transceiver
Nor, NIM and Shah, K and Singh, J and Sauli, Z, Film bulk acoustic wave resonator (FBAR) filter for Ku-band transceiver, Technical Proceedings of the 2013 NSTI Nanotechnology Conference and Expo (NSTI-Nanotech 2013), 12-16 May 2013, Washington, DC, pp. 169-172. ISBN 978-148220584-8 (2013) [Refereed Conference Paper]
This paper presents the optimisation and analysis of the Ku-band FBAR using 3-D finite element modelling (FEM) is presented. The estimation of material damping coefficients (α and β) using the Akhieser approximation is carried out to estimate more accurate values of the coefficients, thus a more realistic value of Q factor will be achieved. The value of β calculated is 3.84e-14 and the Q factor of 300-330 has been achieved for the Ku-band FBAR. The Ku-band FBAR is designed with the optimum thickness ratio of electrode to the piezoelectric material (tm/tp) to achieve a maximum value of the electromechanical coupling coefficient (keff2). A maximum value of keff2 of 6.47% for series FBAR and 6.51% for shunt FBAR is achieved. This work also presents the design of Ku-band FBAR filter implemented with the optimised Ku-band FBAR by using the ABCD matrix method. The designed Ku-band FBAR filter has the centre frequency of 15.5 GHz, the insertion loss of -3.36dB, out-of-band rejection of-11.90dB and fractional bandwidth of 7.0%.
Refereed Conference Paper
AIN, FBAR, Ku-band filter, ladder-type FBAR filter, MEMS, 3-d finite element modelling, AIN, electromechanical coupling coefficients, FBAR, Fbar filters, film bulk acoustic-wave resonators, Ku-band, out of band rejection