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Design and analysis of vibration based MEMS energy harvester for precision agriculture


Aris, H and Fitrio, D and Singh, J, Design and analysis of vibration based MEMS energy harvester for precision agriculture, Technical Proceedings of the 2013 NSTI Nanotechnology Conference and Expo (NSTI-Nanotech 2013), 12-16 May 2013, Washington, DC, pp. 205-208. ISBN 978-148220584-8 (2013) [Refereed Conference Paper]


This paper discusses the performances of different cantilever geometry of piezoelectric MEMS Energy Harvester. Resonant frequency, tip deflection, output voltage and peak power response of five different geometries are compared and analysed. Two piezoelectric materials, ZnO and AlN are utilized as part of the cantilever structures. The design and optimization procedures are done using Coventorware. Meshing refinement study is also carried out to ensure the numerical accuracy of the results and reduce simulation time. The third cantilever design achieved the least resonant frequency, 3.7 kHz and with total peak power response of 0.14 pW.

Item Details

Item Type:Refereed Conference Paper
Research Division:Engineering
Research Group:Mechanical engineering
Research Field:Microelectromechanical systems (MEMS)
Objective Division:Expanding Knowledge
Objective Group:Expanding knowledge
Objective Field:Expanding knowledge in the environmental sciences
UTAS Author:Singh, J (Professor Jack Singh)
ID Code:110283
Year Published:2013
Deposited By:Research Division
Deposited On:2016-07-22
Last Modified:2016-07-22

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