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Design and analysis of vibration based MEMS energy harvester for precision agriculture

conference contribution
posted on 2023-05-23, 11:16 authored by Aris, H, D Fitrio, Singh, J
This paper discusses the performances of different cantilever geometry of piezoelectric MEMS Energy Harvester. Resonant frequency, tip deflection, output voltage and peak power response of five different geometries are compared and analysed. Two piezoelectric materials, ZnO and AlN are utilized as part of the cantilever structures. The design and optimization procedures are done using Coventorware®. Meshing refinement study is also carried out to ensure the numerical accuracy of the results and reduce simulation time. The third cantilever design achieved the least resonant frequency, 3.7 kHz and with total peak power response of 0.14 pW.

History

Publication title

Technical Proceedings of the 2013 NSTI Nanotechnology Conference and Expo (NSTI-Nanotech 2013)

Pagination

205-208

ISBN

978-148220584-8

Publisher

Nanotech Science and Technology Institute

Place of publication

USA

Event title

2013 NSTI Nanotechnology Conference and Expo (NSTI-Nanotech 2013)

Event Venue

Washington, DC

Date of Event (Start Date)

2013-05-12

Date of Event (End Date)

2013-05-16

Repository Status

  • Restricted

Socio-economic Objectives

Expanding knowledge in the environmental sciences

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