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Design optimization of low power and low frequency vibration based MEMS energy harvester


Aris, H and Fitrio, D and Singh, J, Design optimization of low power and low frequency vibration based MEMS energy harvester, Applied Mechanics and Materials, 16-17 November 2013, Guangzhou, China, pp. 1624-1628. ISSN 1660-9336 (2014) [Refereed Conference Paper]

DOI: doi:10.4028/


The development and utilization of different structural materials, optimization of the cantilever geometry and power harvesting circuit are the most commonly methods used to increase the power density of MEMS energy harvester. This paper discusses the cantilever geometry optimization process of low power and low frequency of bimorph MEMS energy harvester. Three piezoelectric materials, ZnO, AlN and PZT are deposited on top and bottom of the cantilever Si substrate. This study focuses on the optimization of the cantilevers length, width, substrate thickness and PZe thickness in order to achieve lower than 600 Hz of resonant frequency. The harvested power for this work is in the range of 0.02 ~ 194.49 nW.

Item Details

Item Type:Refereed Conference Paper
Keywords:energy harvester, low frequency, low power, piezoelectric
Research Division:Engineering
Research Group:Mechanical engineering
Research Field:Microelectromechanical systems (MEMS)
Objective Division:Expanding Knowledge
Objective Group:Expanding knowledge
Objective Field:Expanding knowledge in the environmental sciences
UTAS Author:Singh, J (Professor Jack Singh)
ID Code:110278
Year Published:2014
Deposited By:Research Division
Deposited On:2016-07-22
Last Modified:2016-07-22

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